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Trimethylsilylation of a variety of alcohols and phenols، in the presence of silica chloride، using hexamethyldisilazane (HMDS) in solution and under solvent-free conditions is reported. Trimethylsilyl ethers were formed in excellent yields both for aliphatic alcohols and phenols without having an electron-withdrawing group. In addition، SiO2-Cl can be recovered and reused after drying.